METHOD FOR MEASURING THICKNESS OF THIN OBJECTS WITH A NANOMETER RESOLUTION, BASED ON THE SINGLE-LAYER FLAT-COIL-OSCILLATOR METHOD

Authors

  • S. G. Gevorgyan Center on Superconductivity and Scientific Instrumentation, Chair of Solid State Physics, YSU; Institute for Physical Research, Nat. Academy of Sci., Armenia
  • S. T. Muradyan Center on Superconductivity and Scientific Instrumentation, Chair of Solid State Physics, YSU; Russian-Armenian (Slavonic) State University, Armenia
  • M. H. Azaryan Center on Superconductivity and Scientific Instrumentation, Chair of Solid State Physics, YSU, Armenia
  • G. H. Karapetyan Center on Superconductivity and Scientific Instrumentation, Chair of Solid State Physics, YSU; Institute for Physical Research, Nat. Academy of Sci., Armenia

DOI:

https://doi.org/10.46991/PYSU:A/2010.44.3.063

Keywords:

Single-layer Flat-Coil-Oscillator method, a nanometer resolution thickness measuring and controlling technique, high-Tc superconductive films and tapes

Abstract

A method for measuring of any composition films and tapes thickness with a nanometer resolution is suggested and validated experimentally. That operates on the base of a single-layer flat-coil-oscillator technique. A laboratory prototype of a device is designed and created, based on this method. Besides, PC operation in a “NI LabVIEW” software environment, as well as preliminary tests and calibration of the created device is implemented. It may find variety of applications in a research and in high-tech technology.

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Published

2010-10-21

How to Cite

Gevorgyan, S. G., Muradyan, S. T., Azaryan, M. H., & Karapetyan, G. H. (2010). METHOD FOR MEASURING THICKNESS OF THIN OBJECTS WITH A NANOMETER RESOLUTION, BASED ON THE SINGLE-LAYER FLAT-COIL-OSCILLATOR METHOD. Proceedings of the YSU A: Physical and Mathematical Sciences, 44(3 (223), 63–67. https://doi.org/10.46991/PYSU:A/2010.44.3.063

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Section

Physics