METHOD FOR MEASURING THICKNESS OF THIN OBJECTS WITH A NANOMETER RESOLUTION, BASED ON THE SINGLE-LAYER FLAT-COIL-OSCILLATOR METHOD
DOI:
https://doi.org/10.46991/PYSU:A/2010.44.3.063Keywords:
Single-layer Flat-Coil-Oscillator method, a nanometer resolution thickness measuring and controlling technique, high-Tc superconductive films and tapesAbstract
A method for measuring of any composition films and tapes thickness with a nanometer resolution is suggested and validated experimentally. That operates on the base of a single-layer flat-coil-oscillator technique. A laboratory prototype of a device is designed and created, based on this method. Besides, PC operation in a “NI LabVIEW” software environment, as well as preliminary tests and calibration of the created device is implemented. It may find variety of applications in a research and in high-tech technology.
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Published
2010-10-21
How to Cite
Gevorgyan, S. G., Muradyan, S. T., Azaryan, M. H., & Karapetyan, G. H. (2010). METHOD FOR MEASURING THICKNESS OF THIN OBJECTS WITH A NANOMETER RESOLUTION, BASED ON THE SINGLE-LAYER FLAT-COIL-OSCILLATOR METHOD. Proceedings of the YSU A: Physical and Mathematical Sciences, 44(3 (223), 63–67. https://doi.org/10.46991/PYSU:A/2010.44.3.063
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Physics
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Copyright (c) 2010 Proceedings of the YSU
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